ACCELEROMETER WITH SILICON PENDULUM ASSEMBLY WHICH IMPROVES SCALE FACTOR LINEARITY UNDER HIGH-G ACCELERATION

摘要

PURPOSE: A silicon pendulum assembly embedded type accelerometer is provided to improve linearity of output of an accelerometer and to perform accurate detection of acceleration by preventing distortion of torque coefficient and to maintain a scale factor constant by allowing a pendulum assembly to perform motion of straight line with respect to input acceleration. CONSTITUTION: A silicon pendulum assembly embedded type accelerometer includes a reference plate(1), an upper cover(2), a pendulum assembly(3), an upper magnet assembly(4), a lower magnet assembly(5), a coupling ring(6) and a fixing ring(7). The pendulum assembly includes a thin pendulum plate(9) made of a single crystalline silicon and a support frame(11). A protrusion unit(10) formed on and below the support frame is fixed between two magnet assemblies by being supported by two insulation rings. The pendulum assembly is assembled in an aligned state between the two magnet assemblies. The upper/lower magnet assemblies consist of an upper/lower magnet housings, magnets and magnet caps. The upper/lower magnet housings are coupled with the insulation rings. The pendulum assembly and the upper/lower magnet housings are connected to a servo electronic circuit through an internal terminal plate.