O-RING FOR RETURNING A SUBSTRATE CAPABLE OF IMPROVING QUALITY BY PREVENTING THE DERAILMENT OF A SUBSTRATE AND MALFUNCTIONS IN A FOLLOWING PROCESS

摘要

PURPOSE: An O-ring for returning a substrate is provided to prevent a substrate and the O-ring from slipping and to improve accuracy by preventing the horizontal derailment of the substrate when the substrate is returned.;CONSTITUTION: An O-ring (30) for returning a substrate is inserted into the outer periphery of a return roller (20). Multiple protrusions and grooves are repeatedly and formed on the outer surface of the O-ring in a square shape. The protrusions and grooves are formed in two lines and are symmetrical to each other. Embossed portions are formed on the surfaces of the protrusions.;COPYRIGHT KIPO 2013