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SILICONE SLUDGE DRYING METHOD CAPABLE OF REMOVING OIL FROM SILICONE SLUDGE
SILICONE SLUDGE DRYING METHOD CAPABLE OF REMOVING OIL FROM SILICONE SLUDGE
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机译:能够从硅泥中除油的硅泥干燥方法
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PURPOSE: A silicone sludge drying method is provided to recycle silicone sludge generated during semiconductor and solar wafer processing processes using a microwave drying method.;CONSTITUTION: A silicone sludge drying method is as follows. A conveyor belt (140) sends silicone sludge to a microwave drying chamber (110). The silicone sludge is heated in the microwave drying chamber at a temperature of 40-100 degrees using microwaves to remove oil from the silicone sludge. The silicone sludge comprises silicone and 50-80 weight% of SiC. The conveyor belt is a mesh belt composed of mesh apertures.;COPYRIGHT KIPO 2013;[Reference numerals] (116) O2 sensor; (120) Controller
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