Absolute displacement detection method and absolute displacement sensor using the method

摘要

absolute displacement sensor ( 1) is to be detected as a sensor housing body (2) , the sensor housing (2) mass (3) with movement possibly supported mass (m) as the spring coefficient (k) and damping coefficient (c), detecting means for electrically detecting the relative velocity of the sensor housing (2) for the mass (3) 4, the positive relative displacement , the relative speed of the primary differential relative acceleration obtained by the negative feedback to each of which controls the absolute displacement of the mass body 3 attributable to the absolute displacement of the sensor housing (2) feedback control means (5) , and a phase lag compensation means 6 that the phase delay compensation for the relative displacement .