ABSOLUTE DISPLACEMENT DETECTION METHOD AND ABSOLUTE DISPLACEMENT SENSOR USING THE METHOD

摘要

PROBLEM TO BE SOLVED: To provide an absolute displacement detection method and an absolute displacement sensor, using the method which can extend a detection range to extremely low frequencies, without requiring difficult adjustment to the positive feedback of relative displacement and detect absolute displacement stably.;SOLUTION: The absolute displacement sensor 1 comprises a sensor housing 2 as an object to be detected; a mass body 3 which is movably supported by the sensor housing 2 with a spring coefficient of k and an attenuation coefficient of c and has a mass of m; a detection means 4 for electrically detecting the relative speed of the sensor housing 2, with respect to the mass body 3; a feedback control means 5 for controlling the absolute displacement of the mass body 3, caused by the absolute displacement of the sensor housing 2 by performing positive feedback of the relative displacement and performing negative feedback of relative acceleration, obtained by once differentiating the relative speed; and a phase delay compensation means 6 for performing phase delay compensation on the relative displacement.;COPYRIGHT: (C)2009,JPO&INPIT