SPECIMEN SUPPORT MEMBER CAPABLE OF EASILY ATTACHING AND DETACHING A SPECIMEN AND A SCANNING ELECTRON MICROSCOPE INCLUDING THE SAME

摘要

PURPOSE: A specimen support member and a scanning electron microscope including the same increase the reliability of evaluation by applying a stable current using a pressure conducting method.;CONSTITUTION: A lower side support element (140) is fixed to a stage element and supports a specimen from the lower side. A lateral side support element (160) is fixed to the lower side support element and supports the specimen from the lateral side. A pressure conducting element (170) is inserted into the lateral side support element, compresses and fixes the specimen, and applies a current to the specimen. The lateral side support element includes a pressure conducting element insertion hole with a female screw inside. The female screw of the pressure conducting element insertion hole is combined with a male screw formed on the side of the pressure conducting element.;COPYRIGHT KIPO 2013