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EUV PELLICLE WITH INCREASED EUV LIGHT TRANSMITTANCE
EUV PELLICLE WITH INCREASED EUV LIGHT TRANSMITTANCE
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机译:极紫外光透射率提高的极紫外光电池
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摘要
According to one exemplary embodiment, an extreme ultraviolet (EUV) pellicle for protecting a lithographic mask includes an aerogel film. The pellicle further includes a frame for mounting the aerogel film over the lithographic mask. The aerogel film causes the pellicle to have increased EUV light transmittance.
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