Transmittance measurements for a variety of x-ray/EUV filter materials and pinhole leak measurements utilizing a new visible light photometer system

摘要

This paper describes a new visible light photometer system and presents the results of a test program where visible light transmission has been measured for a variety of materials of varying thicknesses. From these measurements, equivalent absorption coefficients are presented for some of the materials commonly used in x-ray and extreme ultraviolet filters. Also presented are some criteria for quantifying light leaks through pinholes.