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Process for the preparation of nanostructured coatings of granular NANOCOMPOSITE

机译:制备颗粒状纳米复合材料纳米结构涂层的方法

摘要

FIELD: nanotechnology.;SUBSTANCE: invention relates to nanoelectronics and nanoelectromechanics and can be used in various fields of modern nanoindustry, microelectronics, alternative energetics, etc. In the method of production of the nanostructured coating of granular nanocomposite "metal-ceramic" the nanocomposite is preferably prepared by the method of ion-beam sputtering to form granules with an average diameter of preferably 2-4 nm, and the concentration of the metallic phase in the resulting nanocomposite while spraying is provided in the range of 25-30 atm.%.;EFFECT: invention provides creation of the nanostructured coating that provides increased wear resistance, high dimensional stability, with simultaneous production cost reducing.;2 dwg
机译:技术领域本发明涉及纳米电子学和纳米机电学,并且可以用于现代纳米工业,微电子学,替代能学等的各个领域。在制备颗粒状纳米复合材料“金属陶瓷”的纳米结构涂层的方法中,纳米复合材料优选通过离子束溅射法制备平均粒径优选为2-4nm的颗粒,并且在喷雾时所得纳米复合材料中金属相的浓度在25-30atm。%的范围内。效果:本发明提供了纳米结构涂层的产生,该涂层提供了增强的耐磨性,高尺寸稳定性,同时降低了生产成本。2 dwg

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