METHOD OF MEASURING AMPLITUDE-FREQUENCY CHARACTERISTICS OF MOVABLE ELEMENTS OF MICROMECHANICAL DEVICES

摘要

FIELD: physics.;SUBSTANCE: method involves generating harmonic signals with a constant component on fixed capacitor plates, from which compensation current, which is equal to the first harmonic of the sum of currents flowing through the capacitor, is generated. Constant voltage equal to zero is maintained at the movable plate. The compensation current is generated by iteration, while varying the amplitude of the compensation current and optionally the phase to achieve minimum amplitude of the first harmonic of the output signal. The difference between the compensation charge and the sum of charges flowing through the capacitor is converted to proportionally dependent output voltage. A second harmonic is selected in the output signal. The amplitude-frequency characteristic of the micromechanical device is defined by the ratio of the second harmonic of the output voltage to the first harmonic of the signal generated on capacitor plates.;EFFECT: broader functional capabilities, high accuracy of measuring amplitude-frequency characteristics.;2 dwg