Device for treating and/or processing of substrates, has drive having drive shaft mounted on eccentric cam which upon rotation of drive shaft causes displacement of main level in direction of surface normal to main level

摘要

The device has housing (1) having closable opening for introducing and/or output of a substrate (4) into enclosed space (2). A handling device (6) has a drive (9) for the displacement of main level (8) arranged inside the enclosed space in the direction of the surface normal to the main level. The drive has drive shaft (12) arranged within the enclosed space and mounted on the eccentric cam (10) which upon rotation of the drive shaft causes the displacement of the main level in the direction of surface normal to the main level.