首页>
外国专利>
Continuous furnace of substrate processing system, has heating unit and gas supply unit that are formed inside the interior spaces
Continuous furnace of substrate processing system, has heating unit and gas supply unit that are formed inside the interior spaces
展开▼
机译:基板处理系统的连续炉,在内部空间内部形成有加热单元和气体供给单元
展开▼
页面导航
摘要
著录项
相似文献
摘要
The furnace (1,1') has a division walls (4-6) that are formed in the interior spaces (7,8). The division walls are arranged separated from each other and from transport system (9,10). The heating unit (11,12) and gas supply unit (13,14) are formed inside the interior spaces. Independent claims are included for the following: (1) substrate processing system; and (2) method for processing substrate.
展开▼