Pressure sensor has outer surface on which electrically conductive coating which is in galvanic contact with membrane electrode is formed

摘要

The pressure sensor (1) has measuring chamber having ceramic diaphragm (2) that is pressure sealed to cylindrical ceramic base (3) together along peripheral glass joint (4). A capacitive transducer has membrane electrode (7) and base electrode (8,9) such that capacitance between electrodes (7,8) is dependent on pressure-dependent position of diaphragm. An electrically conductive coating (14) which is in galvanic contact with membrane electrode is formed in sensor outer surface.