A method for the detection of radiation and an inspection apparatus for radiation-based examination of a sample

摘要

A process for the detection of radiation in the case of the examination of a sample (1) comprises the steps of generating the radiation, in particular x-rays or proton radiation, with a swelling device (10), the radiation passes through the sample (1), and detection of the radiation with at least one photoelectric solid state detector (20), of a photo line section with a predetermined response threshold and a potential pot section for receiving of free charge carriers contains. It is an adjustment of the radiation is provided, in such a way that: the solid state detector (20) separated from the response threshold of the photo line section and in a sensitivity range of the potential pot section is operated. It is also a an inspection apparatus (100) is described, for which an examination of a sample (1) with the use of radiation, in particular x-rays or proton radiation, is configured.