Method for inspection of smooth upper surfaces of optical elements of extreme ultraviolet radiation-projection exposure systems with inspection device, involves guiding gaseous substance on upper surface and forming condensate film

摘要

The method involves guiding a gaseous substance on an upper surface (12) to be examined, so that a condensate film is formed by the condensation of the gaseous substance on the upper surface to be examined. The condensate film is formed by different condensation conditions in the upper surface areas with different upper surface properties, so that the different upper surface areas are visible. The gaseous substance and the upper surface to be examined have different temperatures. An independent claim is included for an inspection device with a provision unit.