首页> 外国专利> Sight glass for vacuum treatment apparatus, for optically controlling processes in plant chamber, comprises a glass sheet and an enclosure, and an optical line, where glass sheet is prism, such that optical line is angled at least one time

Sight glass for vacuum treatment apparatus, for optically controlling processes in plant chamber, comprises a glass sheet and an enclosure, and an optical line, where glass sheet is prism, such that optical line is angled at least one time

机译:用于对植物室中的过程进行光学控制的真空处理设备的视镜,包括玻璃板和外壳以及光路,其中玻璃板是棱镜,使得光路至少倾斜一次

摘要

Sight glass (1), which is present in the form of a insight device for a vacuum treatment apparatus, for optically controlling processes in a plant chamber (2), comprises a glass sheet and an enclosure, and an optical line, which describes the optical path through the sight glass, where the glass sheet is a prism, such that the optical line is angled at least one time. The plant chamber comprises a wall (3), which separates atmospheric pressure region (4) from sub-atmospheric pressure region (5) and the glass sheet is fixed in the enclosure and the enclosure is fixed in the wall. An independent claim is also included for an arrangement comprising a sight glass, where the transmission of an optical signal from a source to a receiver is provided along the optical line.
机译:视镜(1)以真空处理设备的洞察装置的形式存在,用于光学控制植物室(2)中的过程,该视镜(1)包括玻璃板和外壳,以及描述该膜的光学生产线。通过观察镜的光学路径,在该观察镜中,玻璃板是棱镜,从而使光学线至少倾斜一次。植物室包括壁(3),该壁(3)将大气压区域(4)与低于大气压的区域(5)分隔开,并且玻璃板固定在外壳中,而外壳固定在壁中。对于包括观察镜的装置,也包括独立权利要求,其中沿着光线路提供从源到接收器的光信号传输。

著录项

  • 公开/公告号DE102012102489A1

    专利类型

  • 公开/公告日2013-09-26

    原文格式PDF

  • 申请/专利权人 VON ARDENNE ANLAGENTECHNIK GMBH;

    申请/专利号DE201210102489

  • 发明设计人 DASLER ANDREAS;HENTSCHEL MICHAEL;

    申请日2012-03-22

  • 分类号C23C14/52;C23C14/54;H01J37/18;

  • 国家 DE

  • 入库时间 2022-08-21 16:21:52

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