Optical arrangement for e.g. extreme UV lithography, has optical element in which internal channels for transit of fluid are provided, where ends of fluid conduits are directly joined with optical element at connecting section points

摘要

The arrangement (10) has an optical element (12) e.g. mirror, in which internal channels (16, 16a, 16b) for transit of fluid e.g. liquid, are provided. Ends (20a, 20b) of external fluid conduits (18a, 18b) are connected with the optical element at connecting section points (22a, 22b) such that the fluid is supplied into the channels through the fluid conduits and/or discharged from the channels. The ends of the fluid conduits are directly joined with the optical element at the connecting section points. A recess is introduced in the optical element at the connecting section points. An independent claim is also included for a method for manufacturing an optical arrangement.