Diffractive optical elements based on Fourier optical techniques: a new class of optics for extreme ultraviolet and soft x-ray wavelengths

摘要

A diffractive optical element, based on Fourier optics techniques, for use in extreme ultraviolet/soft x-ray experiments has been fabricated and demonstrated. This diffractive optical element, when illuminated by a uniform plane wave, will produce two symmetric off-axis first-order foci suitable for interferometric experiments. The efficiency of this optical element and its use in direct interferometric determination of optical constants are also discussed. Its use in direct interferometric determination of optical constants is also referenced. Its use opens a new era in the use of sophisticated optical techniques at short wavelengths. (C) 2002 Optical Society of America. [References: 5]