首页> 外国专利> Structuring substrate that is useful for photonic crystals, by depositing optical convergent elements, transverse to light beam, on surface of substrate, and applying beam on substrate to form cavity, where the elements have dimensions

Structuring substrate that is useful for photonic crystals, by depositing optical convergent elements, transverse to light beam, on surface of substrate, and applying beam on substrate to form cavity, where the elements have dimensions

机译:通过将横向于光束的光学会聚元件沉积在基板表面上,然后在基板上施加光束以形成腔体来构造可用于光子晶体的基板,其中这些元件具有尺寸

摘要

The process comprises depositing optical convergent elements (16), transverse to a light beam (14), on a surface (2A) of a substrate (2), and applying the light beam on a portion of the substrate so as to form a cavity. The optical convergent elements have dimensions (10 nm to 100 mu m) that are less than a width of the light beam such that the light beam is applied on the substrate through the convergent elements, spherical shaped particles and cylindrical shaped sticks whose side walls are disposed against the surface of the substrate intended to be placed opposite to the light beam. The process comprises depositing optical convergent elements (16), transverse to a light beam (14), on a surface (2A) of a substrate (2), and applying the light beam on a portion of the substrate so as to form a cavity. The optical convergent elements: have dimensions (10 nm to 100 mu m) that are less than a width of the light beam such that the light beam is applied on the substrate through the convergent elements, spherical shaped particles and cylindrical shaped sticks whose side walls are disposed against the surface of the substrate intended to be placed opposite to the light beam; are disposed in a single layer; are disposed between the substrate and a support partially transparent to the wavelength of the light beam; and are removed by the light beam. The light beam is produced by a laser, and scans the substrate at the portion of the substrate covered by the optical convergent elements. The method further comprises interposing a converging lens between the laser and the optical convergent elements. An independent claim is included for a device for structuring a substrate.
机译:该方法包括在基板(2)的表面(2A)上横向于光束(14)沉积光学会聚元件(16),并将光束施加在基板的一部分上以形成空腔。 。光学会聚元件的尺寸(10nm至100μm)小于光束的宽度,使得光束通过会聚元件,球形颗粒和侧壁形状为圆柱形的圆柱状棒施加在基板上。设置在要与光束相对放置的基板表面上。该方法包括在基板(2)的表面(2A)上横向于光束(14)沉积光学会聚元件(16),并将光束施加在基板的一部分上以形成空腔。 。光学会聚元件:具有小于光束宽度的尺寸(10 nm至100μm),以使光束通过会聚元件,球形颗粒和圆柱形棒(其侧壁具有光束)施加到基板上相对于要与光束相对放置的基板表面设置;布置在单层中;设置在基板和对光束的波长部分透明的支撑件之间;并且被光束去除。光束由激光产生,并且在基板的被光学会聚元件覆盖的部分处扫描基板。该方法还包括将会聚透镜置于激光器和光学会聚元件之间。包括用于构造衬底的设备的独立权利要求。

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