RESISTANCE EXTRACTION APPARATUS, RESISTANCE EXTRACTION METHOD, AND COMPUTER-READABLE RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a resistance extraction apparatus and a resistance extraction method for extraction of source and drain resistance values of a transistor such as silicon nanowire MOSFET.;SOLUTION: The present invention receives parameter values of a semiconductor element measured in turn-on and turn-off states of the semiconductor element (S1100), extracts resistance values independent of voltage, using parameter values measured in a turn-off state (S1110), receives parameter values measured in a turn-on state (S1120), and extracts resistance values dependent on a voltage applied to the semiconductor element (S1130).;COPYRIGHT: (C)2014,JPO&INPIT