SUBSTRATE CRACK DETECTION APPARATUS, POLISHING APPARATUS INCLUDING THE SAME, AND SUBSTRATE CRACK DETECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a detection apparatus to detect a crack of a substrate during a polishing process or before and after the polishing process.;SOLUTION: The detection apparatus includes: a sound sensor or vibration sensor 10 disposed inside a substrate retainer T to retain a substrate W; a control part 13 to receive all the time an output signal from the sound sensor or vibration sensor 10; and a storage part 15 to store, as a reference value, sound or vibration during polishing in a state in which the substrate W is not cracked. The control part 13 detects a crack of the substrate W by comparing a value of at least one of the sound and vibration to be received and the reference value stored in the storage part 15.;COPYRIGHT: (C)2014,JPO&INPIT