MOTOR DRIVE FOR VACUUM PUMP AND VACUUM PUMP

摘要

PROBLEM TO BE SOLVED: To provide a motor drive for vacuum pump, capable of quickly accommodating reverse rotation of a motor when starting while suppressing cost.SOLUTION: In the motor drive for vacuum pump, when starting a pump, Id, Iq setting section 402 sets a q-axis current command of acceleration driving when a rotational speed is a positive value showing a forward rotational state, and always sets a q-axis current command of deceleration driving when the rotational speed is a negative value showing a reverse rotational state. By changing processing in the hitherto provided Id, Iq setting section 402, a motor is decelerated whenever the motor reversely rotates, thus promptly achieving shifting to a normal pump starting operation.