NITRIDE SEMICONDUCTOR CRYSTAL OF GROUP 13 METAL IN PERIODIC TABLE, DEVICE HAVING NITRIDE SEMICONDUCTOR CRYSTAL OF GROUP 13 METAL IN PERIODIC TABLE, AND PRODUCTION METHOD OF NITRIDE SEMICONDUCTOR CRYSTAL OF GROUP 13 METAL IN PERIODIC TABLE

摘要

PROBLEM TO BE SOLVED: To provide a nitride semiconductor crystal of a group 13 metal in the periodic table suitable as a p-type semiconductor layer, and a production method capable of producing such a nitride semiconductor crystal of the group 13 metal in the periodic table.;SOLUTION: A nitride semiconductor crystal of a group 13 metal in the periodic table having the Mg concentration of 1×10¹⁸ atoms/cm³ or higher, the H concentration of 5×10¹⁷ atoms/cm³ or lower and the O concentration of 1×10¹⁷ atoms/cm³ or lower can be used for a crystal suitable as a p-type semiconductor layer.;COPYRIGHT: (C)2014,JPO&INPIT