INDUCTION HEATING FURNACE, AND SIC SUBSTRATE ANNEALING METHOD

摘要

PROBLEM TO BE SOLVED: To uniformly heat an SiC substrate by an induction heating coil.;SOLUTION: Winding density of ends 11, 12 of an induction heating coil 8 is made higher than that of a center part 10. An induction current flowing to a heating part 15 by an alternating magnetic field formed by the induction heating coil 8 is made larger at both end positions of the heating part 15 than at a center position. Heat is easily escaped from both ends of the heating part 15, and therefore, the heating part 15 is made to constant temperature by increasing a heating value. Plural SiC substrates 3 arranged in line along a center axial line of the induction heating coil 8 are made so that the SiC substrates 3 positioned at the ends 11, 12 and the SiC substrate positioned at the center part 10 in line with each other have the identical sheet resistance. Thus, variation of the sheet resistance becomes small.;COPYRIGHT: (C)2014,JPO&INPIT