SHAPE MEASUREMENT METHOD, STRUCTURE MANUFACTURING METHOD, SHAPE MEASUREMENT PROGRAM, OPTICAL TYPE SHAPE MEASUREMENT DEVICE, STRUCTURE MANUFACTURING SYSTEM AND MEASUREMENT CONDITION SETTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a shape measurement method that enables an accurate measurement of a shape of a measurement object.;SOLUTION: The shape measurement method has: an irradiation step of irradiating a first area of a measurement object with measurement light from an optical probe; a photographing step of photographing an image of the first area irradiated with the measurement light by the optical probe, and generating image data on the image of the photographed first area; a deviation calculation step of calculating deviation information indicative of a deviation between a position of the first area of the measurement object and a position of a reference area on the basis of the image data generated in the photographing step and reference image data; and a measurement step of measuring a position of each portion of the measurement object by the optical probe, while changing a relative position between the optical probe and the measurement object.;COPYRIGHT: (C)2014,JPO&INPIT