SOFT ABRASIVE PAD AND METHOD OF MANUFACTURING SOFT ABRASIVE PAD

摘要

PROBLEM TO BE SOLVED: To provide a soft abrasive pad, along with its manufacturing method, capable of preventing a form of a slurry groove from being transferred to a polished object during a period between stopping of rotation of the polished object and the abrasive pad and releasing of polishing pressure.;SOLUTION: A soft abrasive pad 7 is manufactured by a wet film formation method, and is made of polyurethane foam in which tear-shaped air bubbles 29 are formed. It includes a plurality of grooves 21 formed at a surface 19 opposite to a polishing surface 9, and a support part 27 formed between the adjoining grooves 21. Between a bottom 23 of the groove 21 and the polishing surface 9, a bridge part 25 which connects the adjoining support parts 27 is formed. The bridge part 25 has a thickness for deflection toward a surface side opposite to the polished surface under a liquid pressure when a polishing slurry flows.;COPYRIGHT: (C)2015,JPO&INPIT