SHAPE MEASUREMENT INSTRUMENT AND SHAPE MEASUREMENT METHOD USING SHACK-HARTMANN SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a method and instrument which accurately measure an optical component by using a Shack-Hartmann sensor.;SOLUTION: In a method which measures a shape of a light-transmissive measurement object by using a shape measurement instrument provided with a light source and a Shack-Hartmann sensor, positions or a light quantity distribution of light spots is measured to obtain data. In the case that light spots are composite light spots formed by superimposition of reflected light spots from a test surface and reflected light spots from a rear side of the measurement object, a function set for composite light spots which is defined with respective spot widths or peak values of reflected light spots from the test surface and reflected light spots from the rear side of the measurement object, as constants is used to perform fitting processing on data of the light quantity distribution of composite light spots, and positions of the reflected light spots from the test surface are individually acquired with high accuracy, whereby the shape of the light-transmissive measurement object is measured.;COPYRIGHT: (C)2014,JPO&INPIT