Compositions and method of the neutral layer for inducing self-assembled block copolymer

摘要

The present invention relates to a method for using the new neutral layer composition , and inducing self-assembled block copolymer middle layer composition in order to make the micro- domain sequence of the polymer (BCP). The compositions and methods are useful for the manufacture of electronic devices . Middle layer composition comprises at least one random copolymer having at least one unit , at least one unit of structure ( 2 ) , and at least one unit of structure ( 3 ) of the structure ( 1 ) . [ Formula 1 ] In the formula , R ₁ Is , C ₁ ~C ₈ Alkyl , C ₁ ~C ₈ Fluoro alkyl moiety , C ₁ ~C ₈ Partially fluorinated alkyl , C ₄ ~C ₈ Cycloalkyl , C ₄ ~C ₈ Cyclo fluoroalkyl , C ₄ ~C ₈ Partially fluorinated cycloalkyl , and C ₂ ~C ₈ Is selected from the group consisting of hydroxyalkyl ; R ₂ , R ₃ And R ₅ Is , independently , H, C ₁ ~C ₄ Alkyl , CF ₃ And is selected from the group consisting of F; R ₄ Is , H, C ₁ ~C ₈ Alkyl , C ₁ ~C ₈ Partially fluorinated alkyl , and C ₁ ~C ₈ Is selected from the group consisting of fluoroalkyl , n is in the range of 1~5, R ₆ Is , H, F, C ₁ ~C ₈ Alkyl and C ₁ ~C ₈ Is selected from the group consisting of fluoroalkyl and m is in the range of 1-3 .