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The composition and its method of neutral layer for inducing self-assembled block copolymer
The composition and its method of neutral layer for inducing self-assembled block copolymer
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机译:诱导自组装嵌段共聚物的中性层的组成及其方法
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摘要
The present invention relates to novel neutral layer compositions and methods for using the neutral layer compositions for aligning microdomains of directed selfassembling block copolymers (BCP). The compositions and processes are useful for fabrication of electronic devices.
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