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Barium - scandium oxide target for a dispenser cathode

机译:分配器阴极的钡-氧化dium靶

摘要

The invention relates to the field of production of barium-scandate dispenser cathodes or other barium-scandate materials. A target (66) containing a mixture of BaO, CaO, Al2O3 and Sc2O3 tends to be more stable, the higher the scandia (scandium oxide) content is. However, an increased scandia content results in a reduced emission capability. A destabilizing effect of BaO and CaO reactions is counteracted by the more inert Sc2O3 and also Al2O3 components, as not only an increased scandia content stabilizes the material but also an increased alumina (aluminum oxide) content improves the stability.
机译:本发明涉及钡钡酸盐分配器阴极或其他钡钙酸盐材料的生产领域。 the(氧化dium)含量越高,含有BaO,CaO,Al 2 O 3和Sc 2 O 3的混合物的靶材(66)趋于更稳定。然而,增加的scan虫含量导致降低的发射能力。惰性更高的Sc2O3和Al2O3组分可抵消BaO和CaO反应的不稳定作用,因为不仅增加的scan含量可以稳定材料,而且增加的氧化铝(氧化铝)含量也可以提高稳定性。

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