首页> 外文会议>2012 Thirteenth IEEE International Vacuum Electronics Conference >Reactive desorption of barium oxide and scandium oxide from model thin film scandate cathodes
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Reactive desorption of barium oxide and scandium oxide from model thin film scandate cathodes

机译:氧化钡和氧化dium从模型薄膜scan酸盐阴极上的反应性解吸

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摘要

Model scandate cathodes made from sputter-deposited thin films of BaO on Sc2O3 on W fail due to preferential desorption of both BaO and Sc2O3 from areas of the cathode where both oxides were deposited.
机译:由在W上的Sc2O3上溅射沉积的BaO薄膜制成的模型扫描阴极无法使用,原因是BaO和Sc2O3都优先从沉积两种氧化物的阴极区域解吸。

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