Optical thin film and manufacturing method thereof, an optical multilayer film including an optical thin film, optical components, exposure apparatus and exposure method including an optical component having an optical film

摘要

PPROBLEM TO BE SOLVED: To provide an optical thin film containing a fluoride, which can be produced by using a general-purpose production facility, and has a fine structure that shows a high refractive index at a wave length of 200 nm or less, and to provide a production method for the optical thin film. PSOLUTION: The optical thin film includes fluorides of lanthanum and gadolinium, and the ratio of the number of moles of gadolinium with respect to the total number of moles of lanthanum and gadolinium is 0.01-0.95. The method for producing the optical thin film includes: preparing a substrate; preparing a vapor deposition material in which lanthanum fluoride and gadolinium fluoride are mixed so that the ratio of the number of moles of gadolinium with respect to the total number of moles of lanthanum and gadolinium becomes 0.1-0.95; and vapor-depositing the vapor deposition material on the substrate. PCOPYRIGHT: (C)2011,JPO&INPIT