OPTICAL THIN FILM, OPTICAL MEMBER, OPTICAL SYSTEM, PROJECTION EXPOSURE APPARATUS AND MANUFACTURING METHOD FOR OPTICAL THIN FILM

摘要

PPROBLEM TO BE SOLVED: To obtain an optical thin film in which interference conditions change slowly even when the solid state deposition of contaminants occurs, and the reduction of optical characteristics is suppressed. PSOLUTION: In the multi-layered optical thin film 10, at least two layers 11, 12 and 13 having different refractive index are layered on a base material, and the 1st layer 11 coming in contact with an incident medium is constituted of a porous layer having a pore filling density of 70%, and the gap 16 of the porous layer is formed into an open pore. PCOPYRIGHT: (C)2005,JPO&NCIPI