PROBLEM TO BE SOLVED: To provide a sensor element for detecting pressure or load which is a micro electromechanical element comprising a vibrator, drive electrodes to which a signal for vibrating the vibrator is fed, and detection electrodes for detecting vibration of the vibrator, and which is less affected by parasitic capacitance caused by drive electrode wiring.;SOLUTION: A sensor element 1 is a micro electromechanical element having a support substrate 11, a vibrator movably supported by the support substrate 11, drive electrodes to which a signal for vibrating the vibrator is fed, and detection electrodes for detecting vibration of the vibrator, and is provide with ground wiring lines connected to ground between at least some of drive electrode wiring lines and detection electrode wiring lines. The effect of parasitic capacitance caused by the drive electrode wiring on the sensor element 1 is thus reduced without affecting the size of the sensor element 1 and arrangement of components too much.;COPYRIGHT: (C)2014,JPO&INPIT
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