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Plasma confinement ring including RF absorbing material for reducing polymer deposition
Plasma confinement ring including RF absorbing material for reducing polymer deposition
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机译:等离子约束环,包括用于减少聚合物沉积的RF吸收材料
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摘要
Plasma confinement rings are adapted to reach sufficiently high temperatures on plasma-exposed surfaces of the rings to substantially reduce polymer deposition on those surfaces. The plasma confinement rings include an RF lossy material effective to enhance heating at portions of the rings. A low-emissivity material can be provided on a portion of the plasma confinement ring assembly to enhance heating effects.
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