The Effect of Plasma Surface Treatment on a Porous Green Ceramic Film with Polymeric Binder Materials

摘要

To reduce time and energy during thermal binder removal in the ceramic process, plasma surface treatment was applied before the lamination process.The adhesion strength in the lamination films was enhanced by oxidative plasma treatment of the porous green ceramic film with polymeric binding materials.The oxygen plasma characteristics were investigated through experimental parameters and weight loss analysis.The experimental results revealed the need for parameter analysis,including gas material,process time,flow rate,and discharge power,and supported a mechanism consisting of competing ablation and deposition processes.The weight loss analysis was conducted for cyclic plasma treatment rather than continuous plasma treatment for the purpose of improving the film’s permeability by suppressing deposition of the ablated species.The cyclic plasma treatment improved the permeability compared to the continuous plasma treatment.