Temperature measurement method for temperature measurement probe , using the same temperature and measurement system

摘要

PROBLEM TO BE SOLVED: To provide a probe for temperature measurement that does not require any troublesome operations for setting optical path lengths, restricts temperature measurement objects less, and has a wide scope of application.;SOLUTION: The probe for temperature measurement uses interference of low coherence light. The probe for temperature measurement includes: an abutment member 71 which is abutted with the surface of a temperature measurement object, and assimilates with the temperature measurement object thermally; a collimator 72 which radiates measuring light 74 composed of low coherence light to the abutment member 71, and receives reflected light 75a from the surface of the abutment member 71 and reflected light 75b from its backside, respectively; and a cylindrical member 73 which regulates the interval between the abutment member 71 and the collimator 72 to a predetermined length, and isolates optical paths of the measuring light 74 and the rays of the reflected light 75a, 75b from an atmosphere where the measurement object is put.;COPYRIGHT: (C)2011,JPO&INPIT