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PROBE FOR TEMPERATURE MEASUREMENT, TEMPERATURE MEASUREMENT SYSTEM, AND TEMPERATURE MEASUREMENT METHOD USING THE SAME WITH A WIDENED TEMPERATURE MEASUREMENT RANGE

机译:用于温度测量的探头,温度测量系统以及使用具有相同温度测量范围的相同温度测量方法

摘要

PURPOSE: A probe for temperature measurement, a temperature measurement system, and a temperature measurement method using the same are provided to indirectly measure the temperature of a target object using a temperature measurement member.;CONSTITUTION: A probe for temperature measurement comprises a temperature measurement member, a light irradiating/receiving unit, and a cylindrical member. The temperature measurement member is in contact with the surface of a target object. The light irradiating/receiving unit irradiates measurement light(74) to the temperature measurement member and receives the lights(75a,75b) reflected from the surfaces of the temperature measurement member. The cylindrical member isolates the optical path of the measurement and reflected lights from the target object.;COPYRIGHT KIPO 2012
机译:目的:提供一种用于温度测量的探针,温度测量系统以及使用该温度测量方法的温度测量方法,以利用温度测量构件间接地测量目标物体的温度。部件,光照射/接收单元和圆柱形部件。温度测量构件与目标物体的表面接触。光照射/接收单元将测量光(74)照射到温度测量构件并接收从温度测量构件的表面反射的光(75a,75b)。圆柱形部件将测量的光路和反射光与目标物体隔离。; COPYRIGHT KIPO 2012

著录项

  • 公开/公告号KR20110103331A

    专利类型

  • 公开/公告日2011-09-20

    原文格式PDF

  • 申请/专利权人 TOKYO ELECTRON LIMITED;

    申请/专利号KR20110018891

  • 发明设计人 MATSUDO TATSUO;

    申请日2011-03-03

  • 分类号G01K11/12;G01J5/02;H01L21/324;

  • 国家 KR

  • 入库时间 2022-08-21 17:51:04

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