PROBLEM TO BE SOLVED: To provide a laser processing apparatus that can perform laser processing of high quality with high throughput and enables reduction in size of the apparatus, and others.SOLUTION: The laser processing apparatus 1 includes a laser light source 10, a spatial light modulator 20 of phase modulation type, a driving unit 21, a control unit 22 and an imaging optical system 30. The imaging optical system 30 includes a telecentric optical system. A storage unit 21A included in the driving unit 21 stores a plurality of basic holograms each corresponding to a plurality of basic processing patterns and stores a focusing hologram corresponding to a Fresnel lens pattern. The control unit 22 keeps two or more basic holograms selected from the plurality of basic holograms stored in the storage unit 21A arranged in parallel; the focusing hologram overlapped with each of the basic holograms arranged in parallel to form the whole hologram; and presents the formed whole hologram to the spatial light modulator 20.
展开▼
