Laser irradiation area monitoring apparatus, laser irradiation area monitoring method, laser processing apparatus, and laser processing method

摘要

PROBLEM TO BE SOLVED: To provided a monitoring device capable of monitoring the oxidation of a irradiation region of a laser beam of a work. SOLUTION: A control part 7 is provided with a temperature data calculation part 73 calculating the temperature of the laser beam irradiation region R of the laser beam LB of the work W based on a strength ratio data of a first beam component and a second beam component, a storage part 75 storing previously in a plurality a temperature data based on two light components different in wavelength out of an infrared ray IR thermally radiated, and previously storing a strength data of the first beam component constituting each strength ratio data of a plurality of temperature data, an extraction part 76 selecting the closest temperature data to the temperature data from the storage part 75 based on the temperature data, and extracting the strength data of the first beam component in the selected temperature data, and a decision part comparing the strength data of the extracted first beam component and the first beam component strength data of the irradiation region R.