Magnetic sensor and magnetic equilibrium current sensor using it

摘要

To provide a magnetic balance type current sensor can obtain a stable output characteristics sufficiently when the environment temperature and the magnetic sensor, can suppress the occurrence of the AMR effect by the fixed resistance element is changed. The magnetic sensor of the present invention, which consists of a fixed resistance element and a magnetoresistive element whose resistance value changes by the application of the induced magnetic field from the measured current, the fixed resistance element, through (54) antiparallel coupling film It has a ferromagnetic pinned layer Serufupin stop type which is obtained by antiferromagnetically coupled ferromagnetic film and the second (53) ferromagnetic films of the first and (55) Te, antiparallel coupling film ( 54), and a Ru film having a thickness of the first peak of the antiferromagnetic coupling effect, the first ferromagnetic film (53) and the second ferromagnetic film (55) the difference in magnetization is substantially and characterized by a zero basis.