SUBLIMABILITY AROMATIC COMPOUND REMOVAL MEMBER FOR PROCESS GAS ANALYZING DEVICE, AND PROCESS GAS ANALYZING DEVICE INCLUDING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a sublimability aromatic compound removal member capable of reducing a sampling error and, at the same time, preventing block by crystallization of a sublimability aromatic compound in a piping system, and also to provide a process gas analyzing device capable of stably and continuously analyzing a process gas component throughout the year by installing the member.;SOLUTION: A process gas analyzing device includes: a sublimability aromatic compound removal member for a process gas analyzing device having an absorbent being activated carbon containing nonvolatile acid; a sample gas introduction member for introducing process gas containing a sublimability aromatic compound; the sublimability aromatic compound removal member for removing a sublimability aromatic compound; a process gas pre-processing member arranged between the sample gas introduction member and the removal member; and a gas analyzer arranged on the downstream side of the removal member.;COPYRIGHT: (C)2014,JPO&INPIT