Sample inspection manner and sample survey instrument

摘要

PPROBLEM TO BE SOLVED: To provide a sample inspection method and its device, capable of searching a primary-ray transmission part with a simple structured device, without separately setting an image element for transmitted light inspection inside a vacuum chamber. PSOLUTION: In the sample inspection method and its device, a primary ray is irradiated on a sample 21 retained at a primary-ray transmission part of a sample retainer through the primary-ray transmission part, a secondary ray generated from the sample 21 and passing through the primary-ray transmission part is detected by a secondary ray detection means 3 to enable to obtain a sample image, and also, light (irradiation light) 24 is irradiated on the sample 21 from a side opposite to where the primary-ray transmission part is placed, then an optical image of the sample 21 can be obtained through detection of the reflection light with the above. When the irradiation light 24 is irradiated on the sample 21, positioning between an irradiation area of the irradiating light 24 on the sample 21 and the primary-ray transmission part is carried out to be matched by detecting a passing-though light 24a passing through the primary-ray transmission part through the sample 21 with the use of the secondary-ray detection means 3. PCOPYRIGHT: (C)2011,JPO&INPIT