Electric charge corpuscular ray device and sample production methodological

摘要

PROBLEM TO BE SOLVED: To solve such a problem that precision in removing a damaged layer of a sample depends on the skill of an operator, the damaged layer arising from working on the sample with an FIB system.;SOLUTION: During work of removing a damaged layer which arises from an ion beam, transmitted electrons are detected with a two-dimensional detector, the transmitted electrons arising by irradiating a sample with an electron beam formed by an electron beam optical system, and the timing of the completion of the work of removing the damaged layer is determined on the basis of the blur amount of a diffraction pattern obtained with the two-dimensional detector.;COPYRIGHT: (C)2012,JPO&INPIT