Method of measuring the electrode surface modulus of the solid material and the sample -to- film adhesion evaluation method of the resin surface using the same

摘要

PROBLEM TO BE SOLVED: To provide an evaluation method of elastic modulus of an extreme surface in a solid material sample.;SOLUTION: In a measuring method of elastic modulus of an extreme surface in a solid material sample such as resin film by using an atomic force microscope, a probe of an atomic force microscope is contacted at an elastic displacement as a displacement of a solid material sample within the range providing elastic deformation without providing plastic deformation to the solid material sample. Specifically, the elastic displacement is determined by contrasting a push-in step of measuring the relation between a push-in load on a probe when the probe is pushed in a resin film and a push-in displacement as a displacement of the resin film on this occasion, with a release step of measuring the relation between a release load when the probe pushed in the resin film is released due to decreased load and a release displacement as a displacement of the resin film on this occasion.;COPYRIGHT: (C)2012,JPO&INPIT