In the linear motor where the linear motor and

摘要

PROBLEM TO BE SOLVED: To provide a linear motor in which a guide member is attachable/detachable, a driving stage, and a guide member attachable/detachable to/from the linear motor.;SOLUTION: A spacer 33 of a cylindrical armature 3 includes a through screw hole 331 penetrating substantially vertical to the axis direction of the cylindrical armature. A shaft 302 of a guide member 30 is attached to the through screw hole 331, and the guide member 30 is attached to the armature 3. A roller 301 which is disposed on the end side of the shaft 302 of the guide member 30 and has a smaller outer diameter than that of the shaft 302 is projected to the inner side of the armature 3. The projected roller 301 supports the upper and lower surfaces of a magnet row portion 4 and guides the magnet row portion 4 in the axis direction of the cylindrical armature 3. When the shaft 302 of the guide member 30 is detached from the through screw hole 331, the roller 301 is moved through the through screw hole 331 and detached from the armature 3.;COPYRIGHT: (C)2012,JPO&INPIT