Being vacuum ultraviolet optical occurrence and the ultraviolet optical separated device which generate

摘要

PROBLEM TO BE SOLVED: To provide a vacuum ultraviolet generating and ultraviolet separating device and method that are capable of easily removing an ultraviolet light from a vacuum ultraviolet light in a separating manner.;SOLUTION: A vacuum ultraviolet generating part 2 in a vacuum ultraviolet generating and ultraviolet separating device comprises: a first lens 11 that receives and focuses ultraviolet laser light r; a gas cell 5 that applies wavelength conversion to the focused ultraviolet laser light r and generates vacuum ultraviolet laser light r1; and a second lens 12 that focuses the generated vacuum ultraviolet laser light r1. An ultraviolet separating part 3 therein comprises: a first aperture 21 that allows passage of the focused vacuum ultraviolet laser light r1; a third lens 13 that receives and focuses the vacuum ultraviolet laser light r1 after passing through the first aperture 21; and a second aperture 22 that allows passage of the vacuum ultraviolet laser light r1 focused by the third lens 13. The vacuum ultraviolet generating and ultraviolet separating device decreases a mixture ratio of ultraviolet laser light r2, and extracts the vacuum ultraviolet laser light r1.;COPYRIGHT: (C)2013,JPO&INPIT