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Substrate processing system, verification apparatus, operation verification method of verification apparatus, and verification program
Substrate processing system, verification apparatus, operation verification method of verification apparatus, and verification program
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机译:基板处理系统,验证装置,验证装置的动作验证方法以及验证程序
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摘要
There is provided a substrate processing system that can automatically inspect the operation of various kinds of parts of a semiconductor manufacturing apparatus without increasing the load of a main controller in the semiconductor manufacturing apparatus. In the substrate processing system of the present invention, inspection data of the semiconductor manufacturing apparatus 1 under operation are shared and collected online by a main controller 5, a data collection auxiliary computer 2 and a data collecting computer 3 through a network 6, and the operation state is collectively inspected by an inspecting computer 4.
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