Being compilation method of the compilation methodological null absorption current image

摘要

PROBLEM TO BE SOLVED: To provide a sample inspection device and a creation method for an absorption current image which can acquire a clear absorption current image from an absorbed current detected by using a plurality of probes without including difference in amplification rate in input, and can improve measurement efficiency.;SOLUTION: A plurality of probes 4 are brought into contact with a sample 2, and while irradiating the sample 2 with an electron beam 1, current that flows through the probes 4 is measured, and signals from at least two probes 4 are input into a differential amplifier 6. Output from the differential amplifier 6 is amplified and an absorption current image 7 is created on the basis of the output from the differential amplifier 6 and scanning information of the electron beam 1. Thereby, The clear absorption current image 7 can be obtained without including difference in amplification rate in input, and measurement efficiency in failure analysis of the semiconductor sample 2 can be improved.;COPYRIGHT: (C)2013,JPO&INPIT