In the liquid metal ion source which possesses the needle electrode where the liquid metal ion beam is discharged with production

摘要

PROBLEM TO BE SOLVED: To provide a liquid metal ion source, capable of improving the stability of an emission current value for ion beams, to provide a method of manufacturing the liquid metal ion source, and to provide an ion beam irradiation device with the liquid metal ion source.;SOLUTION: The liquid metal ion source 10 includes a needle electrode 11 formed by two metal wires 11a, 11b arranged in parallel with their outer peripheries contacting each other. The needle electrode 11 includes a guide flow path where the metal wires 11a, 11b have a matched positional relationship, and an emission end T. The guide flow path is formed ranging to the emission end T. The width of the guide flow path is smaller to zero toward the bottom of the guide flow path. So, when liquid metal is supplied to the guide flow path, a capillary phenomenon occurs near the bottom of the guide flow path to develop a volume flow, instead of a normal surface flow. The liquid metal continuously flows to the emission end T, and even the liquid metal poor in wettability is stably supplied to the emission end T, thus stabilizing the emission current value for the ion beams.;COPYRIGHT: (C)2012,JPO&INPIT